太阳成集团122cc(中国)有限公司

Products
MHS Solutions -EFEM

8”/12”Wafer Application
Wafer cassette / FOUP / FOSB / Box loading & unloading
Wafer mapping in cassette
Wafer non-contact pre-aligning
Wafer SCARA robot handling wafers (Optional)
PC based control with Windows OS
SECS/GEM or Customized communication
Baidu
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